Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by 信越化学工業株式会社 filed Critical 信越化学工業株式会社 Priority to JP18165391A priority Critical patent/JPH0737575B2/en Publication of JPH051227A publication Critical patent/JPH051227A/en Publication of JPH0737575B2 publication Critical patent/JPH0737575B2/en Anticipated expiration legal-status Critical Status Expired - Fee Related legal-status Critical Current Links ( en Inventor 義雄 竹内 政晴 高橋 Original Assignee 信越化学工業株式会社 Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Fee Related Application number JP18165391A Other languages Japanese ( ja)